Ellipsometry and Its Applications in Stoichiometry
نویسندگان
چکیده
Ellipsometry is a powerful tool to gain the optical properties of materials though measuring the change of polarization state of the probe light after interaction with the sample. It offers a sensitive, nondestructive and comprehensive way to accurately determine film thickness and optical constants of extensive materials, such as metals, ceramics, glasses, semiconductors, and its compounds and composites. These materials can be liquid phase or even gaseous phase, can be isotropic or anisotropic, and can be bulk materials or multi-layer thin films.
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